Optical constants measurement system for a:H silicon film

Quan Jiang; Zu-lun Lin; Jian-bo Cheng; Kang-cheng Qi; Chang-jun Ge

doi:10.1117/12.783833

17 January 2008 Optical constants measurement system for α:H silicon film

Quan Jiang, Zu-lun Lin, Jian-bo Cheng, Kang-cheng Qi, Chang-jun Ge

Proceedings Volume 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 67235W (2008) https://doi.org/10.1117/12.783833
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

A type of optical constants measuring system controlled by a computer was developed. The system consists of a focusing lens, a monochromator that is composed of a diffraction grating and a photomultiplier, a high-precision voltage amplifier, a level buffer circuit, a data-sampling card composed of a A/D converting circuits, a interrupt circuit and I/O interface circuits and a PC. The heart of the system is a PC, which is served as data sampling, processing and calculating unit. The transmission spectrum of α:H silicon film is measured by this system. Then, a kind of envelopes calculation method proposed by Manifacier is used to calculate refractive index, absorptive coefficient and optical band. The accuracy is of the same orders as for the iteration method.

Citation Download Citation

Quan Jiang, Zu-lun Lin, Jian-bo Cheng, Kang-cheng Qi, and Chang-jun Ge "Optical constants measurement system for α:H silicon film", Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67235W (17 January 2008); https://doi.org/10.1117/12.783833

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