Design, modeling, and fabrication techniques of bulk PZT actuators for MEMS deformable mirrors

Xiaohui Xu; Jiaru Chu

doi:10.1117/12.782453

19 November 2007 Design, modeling, and fabrication techniques of bulk PZT actuators for MEMS deformable mirrors

Xiaohui Xu, Jiaru Chu

Proceedings Volume 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 672403 (2007) https://doi.org/10.1117/12.782453
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

The paper describes the design, modeling and fabrication techniques of bulk PZT actuators for MEMS deformable mirrors. Both the analytical model and finite element method are employed for performance simulation and structure optimization of the bulk PZT actuator. According to the simulation results, thick PZT films with high d₃₁ piezoelectric coefficient are necessary for the deformable mirrors to obtain both high stiffness and large stroke at low voltage for applications in astronomical observation and retina imaging. The fabrication techniques for bulk PZT actuators for MEMS deformable mirrors are investigated, incorporating the bonding of bulk PZT ceramics to Si single crystals with epoxy resin, the thinning and patterning of bulk PZT ceramics using wet-etching method. 1BHF:2HCl:4NH₄Cl:4H₂O solution was used as the etchant. Using the fabrication techniques, we have successfully demonstrated a 4×4 prototype array of 2.5mm-diameter bulk PZT actuators for MEMS deformable mirrors. The bulk PZT actuators show a stroke of 3 μm at ±25V and displacement hysteresis of 15%. The displacement hysteresis was largely eliminated by using the method of staying on the same segment.

Citation Download Citation

Xiaohui Xu and Jiaru Chu "Design, modeling, and fabrication techniques of bulk PZT actuators for MEMS deformable mirrors", Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 672403 (19 November 2007); https://doi.org/10.1117/12.782453

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