Pellicle dimensions for high NA photomasks

Frank Erber; Thomas Schulmeyer; Christian Holfeld

doi:10.1117/12.746681

1 November 2007 Pellicle dimensions for high NA photomasks

Frank Erber, Thomas Schulmeyer, Christian Holfeld

Proceedings Volume 6730, Photomask Technology 2007; 67303Y (2007) https://doi.org/10.1117/12.746681
Event: SPIE Photomask Technology, 2007, Monterey, California, United States

Abstract

At photomask manufacturing, post pellicle inspection suffers from an interference of pellicle size and height dimensions with the inspection equipment requirements. This pellicle shadow causes nonreliable inspection results. The evolution of this effect as well as similar potentially upcoming effects during other lithography processes need to be understood in order to identify potential problems ahead of time and guide the industry accordingly. The study recommends standardizing pellicle size and height dimensions in order to coordinate the required changes at scanner, mask inspection, mask metrology and pellicle vendors in the near and long term. Since frequent changes in other pellicle properties are expected over time to fulfill the requirements for high NA lithography and haze reduction, a standard in pellicle dimensions will also help controlling the complexity of pellicle variations.

Citation Download Citation

Frank Erber, Thomas Schulmeyer, and Christian Holfeld "Pellicle dimensions for high NA photomasks", Proc. SPIE 6730, Photomask Technology 2007, 67303Y (1 November 2007); https://doi.org/10.1117/12.746681

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available