Method of detecting of thin-film coating thickness by means of 0.63-&#956; laser radiation

V. P. Osipov; V. N. Chijevski; D. V. Shabrov

doi:10.1117/12.751941

28 June 2007 Method of detecting of thin-film coating thickness by means of 0.63-&mgr; laser radiation

V. P. Osipov, V. N. Chijevski, D. V. Shabrov

Proceedings Volume 6732, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies; 673213 (2007) https://doi.org/10.1117/12.751941
Event: International Conference on Lasers, Applications, and Technologies '07, 2007, Minsk, Belarus

Abstract

It is described the express optical method of evaluation of thin-film coatings, deposited on metal or semiconductor surface. For the tested samples of enamel-covered duralumin it is found the linear dependence of maximal intensity and half-width of secondary radiation on the thickness of the coating.

Citation Download Citation

V. P. Osipov, V. N. Chijevski, and D. V. Shabrov "Method of detecting of thin-film coating thickness by means of 0.63-&mgr; laser radiation", Proc. SPIE 6732, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies, 673213 (28 June 2007); https://doi.org/10.1117/12.751941

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