High-efficient discharge-pumped ArF (193 nm) excimer laser with a TPI thyratron as a high-voltage switch

Alexander M. Razhev; Andrey A. Zhupikov; Dmitry S. Churkin

doi:10.1117/12.753252

25 July 2007 High-efficient discharge-pumped ArF (193 nm) excimer laser with a TPI thyratron as a high-voltage switch

Alexander M. Razhev, Andrey A. Zhupikov, Dmitry S. Churkin

Proceedings Volume 6735, International Conference on Lasers, Applications, and Technologies 2007: High-Power Lasers and Applications; 67350F (2007) https://doi.org/10.1117/12.753252
Event: International Conference on Lasers, Applications, and Technologies '07, 2007, Minsk, Belarus

Abstract

The results of using the thyratron of the TPI series (pseudo spark gap) as a high-voltage switch in the excitation system of ArF (193 nm) excimer laser are presented. The excitation system of the LC-inverter type based on TPI 10k/20 thyratron in absence of any non-linear elements was developed. An experimental investigation of the energy and temporal parameters of the pumping and lasing for ArF laser on the He:Ar:F₂ mixture with excitation system developed was carried out. The comparative analysis of the ArF laser pumping and radiation parameters in dependence of the high-voltage switch type such as a standard spark gap RU-65, and thyratron TPI 10k/20 was performed. The output radiation energy for a laser with thyratron TPI 10k/20 was obtained to be of 1.4 times higher than that with standard spark gap RU-65 at the same pumping conditions. Such increase the output energy was shown to be achieving owing to higher level of the pumping intensity due to higher voltage on the discharge gap that occurs due to lower energy losses into TPI thyratron in comparison with the RU- 65 spark gap and leads to more efficient energy transfer from storage to discharge circuit. As a result for ArF laser with TPI thyratron in He:Ar:F₂ mixture the output radiation energy of 1.0 J with the total efficiency of 1.7% has been achieved. The advantages of using the TPI thyratron in the excitation system of the ArF excimer laser over spark gap are described.

Citation Download Citation

Alexander M. Razhev, Andrey A. Zhupikov, and Dmitry S. Churkin "High-efficient discharge-pumped ArF (193 nm) excimer laser with a TPI thyratron as a high-voltage switch", Proc. SPIE 6735, International Conference on Lasers, Applications, and Technologies 2007: High-Power Lasers and Applications, 67350F (25 July 2007); https://doi.org/10.1117/12.753252

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