Hybrid interferometric structured light method for surface mapping

Kevin Harding; Gil Abramovich

doi:10.1117/12.735676

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10 October 2007 Hybrid interferometric structured light method for surface mapping

Kevin Harding, Gil Abramovich

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Proceedings Volume 6762, Two- and Three-Dimensional Methods for Inspection and Metrology V; 67620F (2007) https://doi.org/10.1117/12.735676
Event: Optics East, 2007, Boston, MA, United States

Abstract

In order to effectively map fine surface structure ranging from surface finish at the sub-micron level to surface defects which can be millimeter size, methods are needed that can provide sub-micron resolution, but also have sufficient measurement range to see much larger features In the past, this nitch has been addressed with the use of white light interferometry that can be mechanically scanned in depth to provide mappings of structures on a very fine scale. However, such methods are limited to lab situations due to stability requirements, and are not fast enough to be used for a shop floor decision. We propose a system that uses a hybrid of classical laser interferometry for the fine structure, but adds in phase shifted structured light for a coarser measurement within the same data set. We will explore the pros and cons of this approach, and the limitations on the overall system imposed by each method.

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Kevin Harding and Gil Abramovich "Hybrid interferometric structured light method for surface mapping", Proc. SPIE 6762, Two- and Three-Dimensional Methods for Inspection and Metrology V, 67620F (10 October 2007); https://doi.org/10.1117/12.735676

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