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26 October 2007 Multilayer biochips with integrated optics replicated in PMMA and PDMS
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Proceedings Volume 6796, Photonics North 2007; 67960B (2007) https://doi.org/10.1117/12.778515
Event: Photonics North 2007, 2007, Ottawa, Canada
Abstract
This paper describes the development of multi-level lab-on-a-chip devices that use integrated optics to reduce the size and cost of portable dual-function analysis systems. Silicon/polymer and all-polymer devices were fabricated that have separate optics and fluidics layers that are bonded together. The optical layer has hollow v-groove waveguides in anisotropically etched silicon or in polymethylmethacrylate (PMMA) that is replicated from the silicon in a two-step replication procedure using polyvinyl alcohol (PVA) as an intermediate negative replica. Light from hollow v-groove waveguides in the optical layer is coupled to the fluidic layer by reflection from metallized reflective planes. The fluidic layer is constructed of polydimethylsiloxane (PDMS) in a two-step positive replication procedure from a micromachined glass master. A thin intermediate PMMA layer with reflective metal strips seals both the hollow optical waveguides and the PDMS microchannels.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. Hosseinkhannazer, L. Kostiuk, and J. N. McMullin "Multilayer biochips with integrated optics replicated in PMMA and PDMS", Proc. SPIE 6796, Photonics North 2007, 67960B (26 October 2007); https://doi.org/10.1117/12.778515
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