Mechanical properties measurement of silicon nitride thin films using the bulge test

Hun Kee Lee; Seong Hyun Ko; Jun Soo Han; HyunChul Park

doi:10.1117/12.759587

21 December 2007 Mechanical properties measurement of silicon nitride thin films using the bulge test

Hun Kee Lee, Seong Hyun Ko, Jun Soo Han, HyunChul Park

Proceedings Volume 6798, Microelectronics: Design, Technology, and Packaging III; 67981C (2007) https://doi.org/10.1117/12.759587
Event: SPIE Microelectronics, MEMS, and Nanotechnology, 2007, Canberra, ACT, Australia

Abstract

The mechanical properties of silicon nitride films are investigated. Freestanding films of silicon nitride are fabricated using the MEMS technique. The films were deposited onto (100) silicon wafers by LPCVD (Low Pressure Chemical Vapor Deposition). Square and rectangular membranes are made by anisotropic etching of the silicon substrates. Then the bulge test for silicon nitride film was carried out. The thickness of specimens was 0.5, 0.75 and 1μm respectively. By testing both square and rectangular membranes, the reliability and valiant-ness of bulge test with regard to the shape of specimens was investigated. Also considering residual stress in the films, one can evaluate the Young's modulus from experimental load-deflection curves. Young's modulus of the silicon nitride films was about 232GPa. The residual stress is below 100MPa.

Citation Download Citation

Hun Kee Lee, Seong Hyun Ko, Jun Soo Han, and HyunChul Park "Mechanical properties measurement of silicon nitride thin films using the bulge test", Proc. SPIE 6798, Microelectronics: Design, Technology, and Packaging III, 67981C (21 December 2007); https://doi.org/10.1117/12.759587

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available