Paper
29 February 2008 Diffusion dark current in CCDs and CMOS image sensors
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Abstract
Long neglected as unimportant, the dark current that arises due to diffusion from the bulk is assuming a more important role now that CCD and CMOS imagers are finding their way into consumer electronics which must be capable of operating at elevated temperatures. Historically this component has been estimated from the diffusion related current of a diode with an infinite substrate. This paper explores the effect of a substrate of finite extent beneath the collecting volume of the pixel for both a front-illuminated device and a thinned back-illuminated device and develops corrected expressions for the diffusion related dark current. The models show that the diffusion dark current can be much less than that predicted by the standard model
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. M. Blouke "Diffusion dark current in CCDs and CMOS image sensors", Proc. SPIE 6816, Sensors, Cameras, and Systems for Industrial/Scientific Applications IX, 68160I (29 February 2008); https://doi.org/10.1117/12.787729
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CITATIONS
Cited by 4 scholarly publications.
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KEYWORDS
Diffusion

Charge-coupled devices

Back illuminated sensors

Instrument modeling

Semiconducting wafers

CCD image sensors

Doping

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