Diamond-like carbon films deposited by femtosecond laser pulses

Yanlong Guo; Xiao Yuan; Shuyun Wang; Changyong Lu; Xiaobing Wang; Yong Cheng; Haiyuan Cao; Xu Liu

doi:10.1117/12.757418

1 February 2008 Diamond-like carbon films deposited by femtosecond laser pulses

Yanlong Guo, Xiao Yuan, Shuyun Wang, Changyong Lu, Xiaobing Wang, Yong Cheng, Haiyuan Cao, Xu Liu

Proceedings Volume 6825, Lasers in Material Processing and Manufacturing III; 68250N (2008) https://doi.org/10.1117/12.757418
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

Hydrogen-free DLC films has been deposited by femtosecond laser pulse onto (1 0 0) p-type silicon substrates. The laser used for deposition has a pulse energy from 0.4mJ to1.6mJ and pulse width of about 50 fs with the repetition rate of 1 kHz. The laser intensities on the target are from 0.7×10¹⁴W/cm² to 2.8×10¹⁴W/cm². Uniform and wear-resistant DLC films is deposited with fs laser ablating a high purity graphite target at room temperature in vacuum. It is shown that the films has a good hardness ranged from 20 GPa to 30 GPa. Raman spectroscopy, X-ray Photoelectron Spectroscopy and micro-hardness are used to analyze the comprehensive performance of the films, and the results show that the films deposited at the laser intensity of 1.4×10¹⁴W/cm² has better hardness and a higher sp³ content. The sp³ fraction of the films is estimated to be as high as 45.6%.

Citation Download Citation

Yanlong Guo, Xiao Yuan, Shuyun Wang, Changyong Lu, Xiaobing Wang, Yong Cheng, Haiyuan Cao, and Xu Liu "Diamond-like carbon films deposited by femtosecond laser pulses", Proc. SPIE 6825, Lasers in Material Processing and Manufacturing III, 68250N (1 February 2008); https://doi.org/10.1117/12.757418

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