Vapor Deposition Synthesis Of Diamond Films

Andrzej Badzian; Barbara Simonton; Teresa Badzian; Russell Messier; Karl E. Spear; Rustum Roy

doi:10.1117/12.936428

19 December 1986 Vapor Deposition Synthesis Of Diamond Films

Andrzej Badzian, Barbara Simonton, Teresa Badzian, Russell Messier, Karl E. Spear, Rustum Roy

Proceedings Volume 0683, Infrared and Optical Transmitting Materials; (1986) https://doi.org/10.1117/12.936428
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

Experiments were conducted on the deposition of diamond films from hydrogen and methane mixtures on silicon substrates by a microwave plasma enhanced chemical vapor deposition technique. Thin films of diamond were obtained. The crystallinity of the films, as determined by electron diffraction, can be controlled and changed from polycrystalline to amorphous. The chemical vapor deposition method of growing diamonds is discussed in a historical perspective in relationship to the optical properties of natural diamonds and to CVD diamond films.

Citation Download Citation

Andrzej Badzian, Barbara Simonton, Teresa Badzian, Russell Messier, Karl E. Spear, and Rustum Roy "Vapor Deposition Synthesis Of Diamond Films", Proc. SPIE 0683, Infrared and Optical Transmitting Materials, (19 December 1986); https://doi.org/10.1117/12.936428

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