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4 January 2008 Holographic femtosecond laser processing by use of a liquid crystal spatial light modulator
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Abstract
Parallel femtosecond laser processing using a computer-generated hologram displayed on a spatial light modulator is demonstrated. The use of a spatial light modulator enables to perform an arbitrary and variable patterning. This holographic femtosecond laser processing has advantages of high-speed and high light-use efficiency. A critical issue is to precisely control the intensities of the diffraction peaks of the computer-generated hologram. We demonstrated some methods for the control of diffraction peak intensity. We also demonstrate the laser processing with two-dimensional and three-dimensional parallelism using the Fourier hologram.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yoshio Hayasaki "Holographic femtosecond laser processing by use of a liquid crystal spatial light modulator", Proc. SPIE 6832, Holography and Diffractive Optics III, 683205 (4 January 2008); https://doi.org/10.1117/12.755245
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