Near-field diffraction analysis and simulation about nanoscale of Fresnel zone plate

Ji Jang; Changqing Xie; Xiping Xu; Xiaoli Zhu; Ming Liu

doi:10.1117/12.755092

15 January 2008 Near-field diffraction analysis and simulation about nanoscale of Fresnel zone plate

Ji Jang, Changqing Xie, Xiping Xu, Xiaoli Zhu, Ming Liu

Proceedings Volume 6832, Holography and Diffractive Optics III; 68321S (2008) https://doi.org/10.1117/12.755092
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

In this paper, we calculated the numeric results of diffraction field in space of X-ray (λ=4.5nm) Fresnel zone plate based on angular spectrum method, analyzed the axial and radial distribution patterns of X-ray Fresnel zone plate. The Full Width at Half-Maximum (FWHM), Depth Of Focus (DOF) and Strehl efficiency of focus spot were studied. Discussed the relationships between FPZ's design parameter and focus spot properties. At the condition of λ=4.5nm and the outmost width Wn=50nm, the size of focus spot is proportional to the outmost width, and increase slowly with the increase of number of zones and focus length; the DOF of focus spot increase at first; when the focus length increased to 40µm, the DOF incline to a constant; the focus spot's Strehl efficiency increased slowly with the increase of number of zones and focus length.

Citation Download Citation

Ji Jang, Changqing Xie, Xiping Xu, Xiaoli Zhu, and Ming Liu "Near-field diffraction analysis and simulation about nanoscale of Fresnel zone plate", Proc. SPIE 6832, Holography and Diffractive Optics III, 68321S (15 January 2008); https://doi.org/10.1117/12.755092

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