A novel optical MEMS pressure sensor with a mesa diaphragm

Yixian Ge; Ming Wang; Hua Rong; Xuxing Chen

doi:10.1117/12.755190

4 January 2008 A novel optical MEMS pressure sensor with a mesa diaphragm

Yixian Ge, Ming Wang, Hua Rong, Xuxing Chen

Proceedings Volume 6836, MEMS/MOEMS Technologies and Applications III; 68360R (2008) https://doi.org/10.1117/12.755190
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

A novel pressure sensor with a mesa structure diaphragm based on microelectromechanical systems (MEMS) techniques is presented. The operating principle of the MEMS pressure sensor is expatiated by the Fabry-Parot (F-P) cavity model and the relation between pressure and interference light intensity is deduced in the sensor. The mechanical model of the mesa structure diaphragm is validated by simulation, which declares that the mesa structure diaphragm is superior to the planar one on the depth of parallelism. Experimental system is also introduced.

Citation Download Citation

Yixian Ge, Ming Wang, Hua Rong, and Xuxing Chen "A novel optical MEMS pressure sensor with a mesa diaphragm", Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 68360R (4 January 2008); https://doi.org/10.1117/12.755190

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