Characterization of AlGaN on GaN template grown by MOCVD

Jianchang Yan; Junxi Wang; Naixin Liu; Zhe Liu; Jinmin Li

doi:10.1117/12.755635

4 January 2008 Characterization of AlGaN on GaN template grown by MOCVD

Jianchang Yan, Junxi Wang, Naixin Liu, Zhe Liu, Jinmin Li

Proceedings Volume 6841, Solid State Lighting and Solar Energy Technologies; 68410K (2008) https://doi.org/10.1117/12.755635
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

Al_xGa_1-xN layer was grown on sapphire substrate with GaN template by Metal Organic Chemical Vapor Deposition system (MOCVD). High temperature AlN (HT-AlN) interlayer was inserted between Al_xGa_1-xN layer and GaN template to solve the cracking problem that often appears on Al_xGa_1-xN surface when directly grown on high temperature GaN template. Optical microscope, scanning electron microscopy (SEM), atomic force microscope (AFM), high resolution x-ray diffraction (HRXRD) and cathodoluminescence (CL) were used for characterization. It was found that the cracking was successfully eliminated. Furthermore, the crystalline quality of Al_xGa_1-xN layer with HT-AlN interlayer was much improved. Interference fringes were found in the HRXRD images. CL test showed that yellow emission was much reduced for AlGaN layer with HT-AlN interlayer.

Citation Download Citation

Jianchang Yan, Junxi Wang, Naixin Liu, Zhe Liu, and Jinmin Li "Characterization of AlGaN on GaN template grown by MOCVD", Proc. SPIE 6841, Solid State Lighting and Solar Energy Technologies, 68410K (4 January 2008); https://doi.org/10.1117/12.755635

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