Debris generation from CO2 and Nd:YAG laser-produced tin plasmas for EUV light source

D. Nakamura; K. Tamaru; T. Akiyama; A. Takahashi; T. Okada

doi:10.1117/12.767894

14 February 2008 Debris generation from CO₂ and Nd:YAG laser-produced tin plasmas for EUV light source

D. Nakamura, K. Tamaru, T. Akiyama, A. Takahashi, T. Okada

Proceedings Volume 6879, Photon Processing in Microelectronics and Photonics VII; 687909 (2008) https://doi.org/10.1117/12.767894
Event: Lasers and Applications in Science and Engineering, 2008, San Jose, California, United States

Abstract

The results of a comparative investigation on the emission characteristics of debris from CO₂ laser-produced tin plasma and Nd: YAG laser-produced tin plasma for an extreme ultraviolet lithography (EUV) light source. The tin ions and droplets emitted from tin plasma produced by a CO₂ laser or an Nd: YAG laser were detected with Faraday cups and quartz crystal micro-balance (QCM) detectors, respectively. The large size of droplets was also observed by silicon substrates as witness plates. A higher ion kinetic energy and lower debris emission in the case of CO₂ laser in compared with Nd: YAG laser for the same laser energy of ~50 mJ. In addition, the dynamics of the neutral atoms and the irradiated target from an Nd:YAG laser-produced tin plasma with a mass-limited micro-droplet target were investigated by imaging techniques.

Citation Download Citation

D. Nakamura, K. Tamaru, T. Akiyama, A. Takahashi, and T. Okada "Debris generation from CO₂ and Nd:YAG laser-produced tin plasmas for EUV light source", Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 687909 (14 February 2008); https://doi.org/10.1117/12.767894

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