Laser micromachining of branching networks

DongHyuck Kam; Lawrence Shah; Jyotirmoy Mazumder

doi:10.1117/12.761821

23 February 2008 Laser micromachining of branching networks

DongHyuck Kam, Lawrence Shah, Jyotirmoy Mazumder

Proceedings Volume 6880, Laser-based Micro- and Nanopackaging and Assembly II; 68800S (2008) https://doi.org/10.1117/12.761821
Event: Lasers and Applications in Science and Engineering, 2008, San Jose, California, United States

Abstract

We describe maskless rapid prototyping of a micro-fluidic branching network on a silicon wafer with laser direct writing (LDW). The branching micro-channel network is designed as a blood oxygenator following Murray's law and satisfying the necessity of equal path lengths. In development of such micro-fluidic structures, this maskless process will reduce time and cost compared with the conventional photolithography based technique. The flexibility of laser direct writing facilitates creating a multi-depth structure of the branching network, ranging from a few microns to a few hundred microns in depth. In order to create such a wide range of feature sizes, a nanosecond pulsed Nd-YAG laser and a femtosecond pulsed fiber laser are used together. The femtosecond fiber laser is used to create micro-channels with a depth of less than 50μm. As post-processing, a chemical etching in a solution of HF and HNO3 is applied to smooth the laser ablated surface. To realize an optimized design of micro-fluidic structures, influences of operating parameters, such as the pulse energy, the focal position, the transverse speed, and the number of passes, on the depth of micro-channels and their surface quality are investigated. Using the laser machined silicon structures as a mold, a Poly(dimethylsiloxane) (PDMS) replica is created.

Citation Download Citation

DongHyuck Kam, Lawrence Shah, and Jyotirmoy Mazumder "Laser micromachining of branching networks", Proc. SPIE 6880, Laser-based Micro- and Nanopackaging and Assembly II, 68800S (23 February 2008); https://doi.org/10.1117/12.761821

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