Compact modeling of inertial and rarefaction effects on quality factor of MEMS torsional structures in continuum to molecular flows under low operating frequencies

Rudra Pratap; Ashok Kumar Pandey

doi:10.1117/12.769137

22 February 2008 Compact modeling of inertial and rarefaction effects on quality factor of MEMS torsional structures in continuum to molecular flows under low operating frequencies

Rudra Pratap, Ashok Kumar Pandey

Author Affiliations +

Proceedings Volume 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface; 68850D (2008) https://doi.org/10.1117/12.769137
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

The applicability of an existing compact model that captures the effect of rarefaction and inertia is studied in this paper. In order to ascertain the accuracy of the model, we take two different configurations of a torsional MEMS structure from the literature which operate under different frequencies and have different air-gap thicknesses. For the structure with large air-gap and low operating frequency, the analytical model based on the equivalent length captures the effect well under the continuum, slip, transition and the molecular regimes. On the other hand, for the structures with high operating frequencies but low air-gap thickness, the analytical model breaks down in the transition regime.

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Rudra Pratap and Ashok Kumar Pandey "Compact modeling of inertial and rarefaction effects on quality factor of MEMS torsional structures in continuum to molecular flows under low operating frequencies", Proc. SPIE 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 68850D (22 February 2008); https://doi.org/10.1117/12.769137

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KEYWORDS

Microelectromechanical systems

Mirrors

Motion models

Error analysis

Motion analysis

Instrument modeling

Systems modeling

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