Highly integrated microfluidic sensors

Dan E. Angelescu; Hua Chen; Jacques Jundt; Helene Berthet; Bruno Mercier; Frederic Marty

doi:10.1117/12.764028

13 February 2008 Highly integrated microfluidic sensors

Dan E. Angelescu, Hua Chen, Jacques Jundt, Helene Berthet, Bruno Mercier, Frederic Marty

Proceedings Volume 6886, Microfluidics, BioMEMS, and Medical Microsystems VI; 688607 (2008) https://doi.org/10.1117/12.764028
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

We have developed fabrication techniques for creating suspended electrically addressable MEMS structures in microfluidic channels, as well as monolithic integration of sensors within microfluidic devices. As we will demonstrate, creative use of state-of-the-art MEMS fabrication techniques allows the integrated manufacturing of a number of sensors, for simultaneous measurement of, for example, flow velocity, thermal conductivity and normal stress. We will demonstrate the versatility of these techniques with an example of capillary viscosity sensor integrating independent flowrate, temperature, and pressure drop sensors.

Citation Download Citation

Dan E. Angelescu, Hua Chen, Jacques Jundt, Helene Berthet, Bruno Mercier, and Frederic Marty "Highly integrated microfluidic sensors", Proc. SPIE 6886, Microfluidics, BioMEMS, and Medical Microsystems VI, 688607 (13 February 2008); https://doi.org/10.1117/12.764028

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