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12 February 2008 Application concepts for complementary micropneumatic devices and circuits
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Abstract
Previously, we proposed novel microvalve structures, amenable to bulk micromachining, which demonstrated fully complementary behavior. Two distinct microvalves were devised, one analogous to the p-MOSFET, and the other analogous to the n-MOSFET found in complementary MOSFET devices and circuits. Ring oscillator behavior based on digital NOR logic gates was described, for both micro-pneumatics (based on compressible gas flow) and micro-hydraulics (based on incompressible liquid flow). In this work, micro-pneumatic analog circuits are described, based on the previously-described complementary digital pneumatic microvalve devices. In particular, a micro-pneumatic operational amplifier is described and simulated in detail. Also, prospects for energy harvesting or scavenging based on micro-pneumatic circuits are discussed.
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Albert K. Henning "Application concepts for complementary micropneumatic devices and circuits", Proc. SPIE 6886, Microfluidics, BioMEMS, and Medical Microsystems VI, 68860F (12 February 2008); https://doi.org/10.1117/12.771200
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