A novel diffractive micro-optical modulator for mobile display applications

Sang Kyeong Yun; JongHyeong Song; SeungDo An; InJae Yeo; YoonJoon Choi; YeongGyu Lee; HeungWoo Park; KyuBum Han; HaengSeok Yang; Victor Yurlov; Ihar Shyshkin; Anatoliy Lapchuk; HeeYeoun Kim; JaeWook Jang; JeHong Kyoung; JeongSuong Yang; SangKee Yoon; ChangSu Park; JongPil Cheong; YoungNam Hwang; KiSuk Woo; SeungWon Ryu; SeungWoo Lee; ChongMann Koh; YoungKi Baek; DaeHo Bae; HyunKee Lee; JaeHoon Lee; YungHo Ryu; HaeYeon Hwang; ChungMo Yang; OhkKun Lim; DongHyun Park; SeHwan An; JunHee Bae; SungMin Cho; BackSoon Go; SeokKee Hong; HoPhil Jung; SangJin Kim; KiUn Lee; JiHyun Park; JuHwan Yang; GiYoung Byun; SungHo Byun; YoungJin Cho; ChunGi Kim; JooHong Kim; SunKi Kim; SungIl Lee; WhaHyung Lee; KwanYoung Oh; SungKyung Oh; WooChul Shin; ByungKi Song; ElMostafa Bourim

doi:10.1117/12.762568

21 February 2008 A novel diffractive micro-optical modulator for mobile display applications

Sang Kyeong Yun, JongHyeong Song, SeungDo An, InJae Yeo, YoonJoon Choi, YeongGyu Lee, HeungWoo Park, KyuBum Han, HaengSeok Yang, Victor Yurlov, Ihar Shyshkin, Anatoliy Lapchuk, HeeYeoun Kim, JaeWook Jang, JeHong Kyoung, JeongSuong Yang, SangKee Yoon, ChangSu Park, JongPil Cheong, YoungNam Hwang, KiSuk Woo, SeungWon Ryu, SeungWoo Lee, ChongMann Koh, YoungKi Baek, DaeHo Bae, HyunKee Lee, JaeHoon Lee, YungHo Ryu, HaeYeon Hwang, ChungMo Yang, OhkKun Lim, DongHyun Park, SeHwan An, JunHee Bae, SungMin Cho, BackSoon Go, SeokKee Hong, HoPhil Jung, SangJin Kim, KiUn Lee, JiHyun Park, JuHwan Yang, GiYoung Byun, SungHo Byun, YoungJin Cho, ChunGi Kim, JooHong Kim, SunKi Kim, SungIl Lee, WhaHyung Lee, KwanYoung Oh, SungKyung Oh, WooChul Shin, ByungKi Song, ElMostafa Bourim

Author Affiliations +

Proceedings Volume 6887, MOEMS and Miniaturized Systems VII; 688702 (2008) https://doi.org/10.1117/12.762568
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

A diffractive optical modulator has been fabricated based on a micromachining process. Novel properties of its fast response time and dynamics were fully understood and demonstrated for the strong potentials in embedded mobile laser display. Bridged thin film piezo-actuators with so called open mirror diffraction structure has been designed. Optical level package also was achieved to successfully prove its display application qualities. Display circuits and driving logic were developed to finally confirm the single-panel laser display at a 240Hz VGA (640×480). With its efficiency of more than 75% and 13cc volume optical engine with the MEMS-based VGA resolution SOM showed 7 lm brightness at a 1.5W electrical power consumption. Detailed design principle, fabrication, packaging and performances of the invented SOM are described.

Citation Download Citation

Sang Kyeong Yun, JongHyeong Song, SeungDo An, InJae Yeo, YoonJoon Choi, YeongGyu Lee, HeungWoo Park, KyuBum Han, HaengSeok Yang, Victor Yurlov, Ihar Shyshkin, Anatoliy Lapchuk, HeeYeoun Kim, JaeWook Jang, JeHong Kyoung, JeongSuong Yang, SangKee Yoon, ChangSu Park, JongPil Cheong, YoungNam Hwang, KiSuk Woo, SeungWon Ryu, SeungWoo Lee, ChongMann Koh, YoungKi Baek, DaeHo Bae, HyunKee Lee, JaeHoon Lee, YungHo Ryu, HaeYeon Hwang, ChungMo Yang, OhkKun Lim, DongHyun Park, SeHwan An, JunHee Bae, SungMin Cho, BackSoon Go, SeokKee Hong, HoPhil Jung, SangJin Kim, KiUn Lee, JiHyun Park, JuHwan Yang, GiYoung Byun, SungHo Byun, YoungJin Cho, ChunGi Kim, JooHong Kim, SunKi Kim, SungIl Lee, WhaHyung Lee, KwanYoung Oh, SungKyung Oh, WooChul Shin, ByungKi Song, and ElMostafa Bourim "A novel diffractive micro-optical modulator for mobile display applications", Proc. SPIE 6887, MOEMS and Miniaturized Systems VII, 688702 (21 February 2008); https://doi.org/10.1117/12.762568

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