Simulation and interferometer results of MEMS deformable mirrors

Bautista Fernández; Joel Kubby

doi:10.1117/12.766886

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8 February 2008 Simulation and interferometer results of MEMS deformable mirrors

Bautista Fernández, Joel Kubby

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Proceedings Volume 6888, MEMS Adaptive Optics II; 68880R (2008) https://doi.org/10.1117/12.766886
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

Various types of large stroke actuators for Adaptive Optics (AO) were simulated individually and as part of a mirror system consisting of actuators bonded to face plates with different boundary conditions. The actuators and faceplate were fabricated using a high aspect ratio process that enables the fabrication of 3-dimensional Micro-Electro-Mechanical System (MEMS) devices. This paper will review simulation results along with measurements of the displacement of the actuators utilizing a white-light interferometer. Both simulations and interferometer scans have shown the ability of the actuators to achieve displacements of 1/3 of the initial gap between the spring layer and the counter electrode.

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Bautista Fernández and Joel Kubby "Simulation and interferometer results of MEMS deformable mirrors", Proc. SPIE 6888, MEMS Adaptive Optics II, 68880R (8 February 2008); https://doi.org/10.1117/12.766886

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