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8 February 2008 Simulation and interferometer results of MEMS deformable mirrors
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Various types of large stroke actuators for Adaptive Optics (AO) were simulated individually and as part of a mirror system consisting of actuators bonded to face plates with different boundary conditions. The actuators and faceplate were fabricated using a high aspect ratio process that enables the fabrication of 3-dimensional Micro-Electro-Mechanical System (MEMS) devices. This paper will review simulation results along with measurements of the displacement of the actuators utilizing a white-light interferometer. Both simulations and interferometer scans have shown the ability of the actuators to achieve displacements of 1/3 of the initial gap between the spring layer and the counter electrode.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bautista Fernández and Joel Kubby "Simulation and interferometer results of MEMS deformable mirrors", Proc. SPIE 6888, MEMS Adaptive Optics II, 68880R (8 February 2008);

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