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8 February 2008Simulation and interferometer results of MEMS deformable mirrors
Various types of large stroke actuators for Adaptive Optics (AO) were simulated individually and as part of a mirror
system consisting of actuators bonded to face plates with different boundary conditions. The actuators and faceplate
were fabricated using a high aspect ratio process that enables the fabrication of 3-dimensional Micro-Electro-Mechanical
System (MEMS) devices. This paper will review simulation results along with measurements of the displacement of the
actuators utilizing a white-light interferometer. Both simulations and interferometer scans have shown the ability of the
actuators to achieve displacements of 1/3 of the initial gap between the spring layer and the counter electrode.
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Bautista Fernández, Joel Kubby, "Simulation and interferometer results of MEMS deformable mirrors," Proc. SPIE 6888, MEMS Adaptive Optics II, 68880R (8 February 2008); https://doi.org/10.1117/12.766886