Optical Surface Evaluation By Soft X-Ray Scattering

James C. Green; David S. Finley; Stuart Bowyer; Roger F. Malina

doi:10.1117/12.936571

12 August 1986 Optical Surface Evaluation By Soft X-Ray Scattering

James C. Green, David S. Finley, Stuart Bowyer, Roger F. Malina

Proceedings Volume 0689, X-Ray Calibration: Techniques, Sources, and Detectors; (1986) https://doi.org/10.1117/12.936571
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

During the fabrication of the mirrors for the Extreme Ultraviolet Explorer (EUVE), we have developed methods for evaluating the surface quality of our optics. Measurement of soft x-ray scattering profiles allows us to determine the surface roughness and correlation lengths for highly polished metal surfaces. With this method, we have determined the surface param-eters for one of the Wolter Schwarzschild Type I mirrors that we have fabricated for the EUVE mission. We present the techniques employed, the theoretical basis for our method, and the data that we have taken. Our measurements show that our best mirrors have a surface roughness of 20Å RMS or less.

Citation Download Citation

James C. Green, David S. Finley, Stuart Bowyer, and Roger F. Malina "Optical Surface Evaluation By Soft X-Ray Scattering", Proc. SPIE 0689, X-Ray Calibration: Techniques, Sources, and Detectors, (12 August 1986); https://doi.org/10.1117/12.936571

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available