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12 August 1986 Optical Surface Evaluation By Soft X-Ray Scattering
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Abstract
During the fabrication of the mirrors for the Extreme Ultraviolet Explorer (EUVE), we have developed methods for evaluating the surface quality of our optics. Measurement of soft x-ray scattering profiles allows us to determine the surface roughness and correlation lengths for highly polished metal surfaces. With this method, we have determined the surface param-eters for one of the Wolter Schwarzschild Type I mirrors that we have fabricated for the EUVE mission. We present the techniques employed, the theoretical basis for our method, and the data that we have taken. Our measurements show that our best mirrors have a surface roughness of 20Å RMS or less.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James C. Green, David S. Finley, Stuart Bowyer, and Roger F. Malina "Optical Surface Evaluation By Soft X-Ray Scattering", Proc. SPIE 0689, X-Ray Calibration: Techniques, Sources, and Detectors, (12 August 1986); https://doi.org/10.1117/12.936571
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