The Soft X-Ray/EUV Calibration Facility at the University of Colorado

David L. Windt; Webster Cash

doi:10.1117/12.936579

12 August 1986 The Soft X-Ray/EUV Calibration Facility at the University of Colorado

David L. Windt, Webster Cash

Proceedings Volume 0689, X-Ray Calibration: Techniques, Sources, and Detectors; (1986) https://doi.org/10.1117/12.936579
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

The calibration facility at the University of Colorado is being used to evaluate the performance of optics in the soft x-ray and EUV. Using either a hollow cathode gas discharge EUV source or a focussed electron impact x-ray source, we are able to generate light with wavelengths ranging from 2.7 A to 2500 A. Monochromaticity is achieved with a grazing incidence monochromator and filters. The light enters a large vacuum chamber where it illuminates the sample being studied. Standard detectors include a flowing gas proportional counter, a resistive anode MCP, and an NBS photodiode. The optics and detectors are remotely positioned inside the vacuum chamber using computer controlled stepping motor stages. Data acquisition is also computer controlled. Further data processing is performed on a VAX 8600. We have used the facility to evaluate the performance of diffraction gratings, multilayer mirrors, reflective coatings, spectrographs, surface roughness scattering, and absolute detector efficiencies. We present a complete description of the instrumentation and some recent results.

Citation Download Citation

David L. Windt and Webster Cash "The Soft X-Ray/EUV Calibration Facility at the University of Colorado", Proc. SPIE 0689, X-Ray Calibration: Techniques, Sources, and Detectors, (12 August 1986); https://doi.org/10.1117/12.936579

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available