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12 February 2008 Optical waveguide gratings in chalcogenide glass
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Abstract
Fabrication results are reported for making optical gratings in chalcogenide glasses. Two approaches are being investigated: 1) thermal nanoimprinting of the glass using a mold master, and 2) direct patterning of the chalcogenide glass using a combination of electron beam lithography (EBL) and reactive ion etching (RIE). Preliminary results are presented for the nanoimprint and EBL experiments. The nanoimprint results show very smooth sidewalls.
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Xin Xia, Mehmet Solmaz, Hyunsoo Park, Xing Cheng, and Christi K. Madsen "Optical waveguide gratings in chalcogenide glass", Proc. SPIE 6896, Integrated Optics: Devices, Materials, and Technologies XII, 689607 (12 February 2008); https://doi.org/10.1117/12.768584
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