Low density targets for laser-produced-plasma (LPP) extreme ultraviolet light source with high-CE and toward high-repletion supply

Keiji Nagai; Liqin Ge; Pejun Cai; Cao Pan; ZhongZe Gu; Takayoshi Norimatsu; Hiroaki Nishimura; Katsunobu Nishihara; Noriaki Miyanaga; Yasukazu Izawa; Kinioki Mima

doi:10.1117/12.773275

1 April 2008 Low density targets for laser-produced-plasma (LPP) extreme ultraviolet light source with high-CE and toward high-repletion supply

Keiji Nagai, Liqin Ge, Pejun Cai, Cao Pan, ZhongZe Gu, Takayoshi Norimatsu, Hiroaki Nishimura, Katsunobu Nishihara, Noriaki Miyanaga, Yasukazu Izawa, Kinioki Mima

Author Affiliations +

Proceedings Volume 6921, Emerging Lithographic Technologies XII; 69212W (2008) https://doi.org/10.1117/12.773275
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

In the present paper, we overview fabrication methods to produce density-controlled tin and xenon targets for generating extreme ultraviolet (EUV) light. The target can be classified as a mass-limited target. In the case of tin, EUV was relatively monochromatic, and its conversion efficiency was higher than bulk tin. Using the nano-template method, the cellular foam size was controlled by the template size. The density was 0.5 ~1.5 g/cm³. In the case of the 0.5 g/cm³ foam, its morphology was controlled by changing the ethanol content of the precursor tin solution. The morphology difference was useful to control the angular distribution of EUV radiation. SnO₂ nanofiber, which is oriented low-density material, was fabricated continuously using a electrospinning method. The width and the shape of the fiber were controlled by optimizing precursor solution. A transparent film with tin and SnO₂ elliptic spheres were prepared using liquid crystalline cellulose derivative. Low density xenon was prepared from liquid xenon using a swirl atomizer to produce a density of 0.2 g/cm³.

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Keiji Nagai, Liqin Ge, Pejun Cai, Cao Pan, ZhongZe Gu, Takayoshi Norimatsu, Hiroaki Nishimura, Katsunobu Nishihara, Noriaki Miyanaga, Yasukazu Izawa, and Kinioki Mima "Low density targets for laser-produced-plasma (LPP) extreme ultraviolet light source with high-CE and toward high-repletion supply", Proc. SPIE 6921, Emerging Lithographic Technologies XII, 69212W (1 April 2008); https://doi.org/10.1117/12.773275

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