EUV and debris characteristics of a laser-plasma tin dioxide nano-particle colloidal jet target

Masanori Kaku; Sumihiro Suetake; Yusuke Senba; Masahito Katto; Shoichi Kubodera

doi:10.1117/12.771542

21 March 2008 EUV and debris characteristics of a laser-plasma tin dioxide nano-particle colloidal jet target

Masanori Kaku, Sumihiro Suetake, Yusuke Senba, Masahito Katto, Shoichi Kubodera

Proceedings Volume 6921, Emerging Lithographic Technologies XII; 69212Y (2008) https://doi.org/10.1117/12.771542
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

Debris characteristics and its reduction have been investigated for a laser-produced plasma (LPP) extreme ultraviolet (EUV) source using a colloidal jet target containing tin dioxide nano-particles. Dominant deposited debris on a witness plate was found to have a form of oxidized tin (SnO_x) originated from nano-particles. Quantitative debris amounts were determined by total laser energy irradiated onto a target, not by laser irradiation modes, such as single or double pulse irradiation. In-situ low-temperature (100°C) heating of a plate was effective to reduce the deposited debris amount, since colloidal debris was easily vaporized by the heat. Another approach to remove the deposited debris was roomtemperature photon processing using incoherent vacuum ultraviolet (VUV) emission at 126 nm. X-ray photoelectron spectroscopy (XPS) analysis has shown that the deposited SnOx debris layer was deoxidized by the 126 nm VUV photon energy.

Citation Download Citation

Masanori Kaku, Sumihiro Suetake, Yusuke Senba, Masahito Katto, and Shoichi Kubodera "EUV and debris characteristics of a laser-plasma tin dioxide nano-particle colloidal jet target", Proc. SPIE 6921, Emerging Lithographic Technologies XII, 69212Y (21 March 2008); https://doi.org/10.1117/12.771542

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