Automatic hotspot classification using pattern-based clustering

Ning Ma; Justin Ghan; Sandipan Mishra; Costas Spanos; Kameshwar Poolla; Norma Rodriguez; Luigi Capodieci

doi:10.1117/12.772867

4 March 2008 Automatic hotspot classification using pattern-based clustering

Ning Ma, Justin Ghan, Sandipan Mishra, Costas Spanos, Kameshwar Poolla, Norma Rodriguez, Luigi Capodieci

Proceedings Volume 6925, Design for Manufacturability through Design-Process Integration II; 692505 (2008) https://doi.org/10.1117/12.772867
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

This paper proposes a new design check system that works in three steps. First, hotspots such as pinching/bridging are recognized in a product layout based on thorough process simulations. Small layout snippets centered on hotspots are clipped from the layout and similarities between these snippets are calculated by computing their overlapping areas. This is accomplished using an efficient, rectangle-based algorithm. The snippet overlapping areas can be weighted by a function derived from the optical parameters of the lithography process. Second, these hotspots are clustered using a hierarchical clustering algorithm. Finally, each cluster is analyzed in order to identify the common cause of failure for all the hotspots in that cluster, and its representative pattern is fed to a pattern-matching tool for detecting similar hotspots in new design layouts. Thus, the long list of hotspots is reduced to a small number of meaningful clusters and a library of characterized hotspot types is produced. This could lead to automated hotspot corrections that exploit the similarities of hotspots occupying the same cluster. Such an application will be the subject of a future publication.

Citation Download Citation

Ning Ma, Justin Ghan, Sandipan Mishra, Costas Spanos, Kameshwar Poolla, Norma Rodriguez, and Luigi Capodieci "Automatic hotspot classification using pattern-based clustering", Proc. SPIE 6925, Design for Manufacturability through Design-Process Integration II, 692505 (4 March 2008); https://doi.org/10.1117/12.772867

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