Modeling and simulation of a 2-DOF bidirectional electrothermal microactuator

N. Topaloglu; C. Elbuken; P. M. Nieva; M. Yavuz; J. P. Huissoon

doi:10.1117/12.776594

3 April 2008 Modeling and simulation of a 2-DOF bidirectional electrothermal microactuator

N. Topaloglu, C. Elbuken, P. M. Nieva, M. Yavuz, J. P. Huissoon

Proceedings Volume 6926, Modeling, Signal Processing, and Control for Smart Structures 2008; 692605 (2008) https://doi.org/10.1117/12.776594
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2008, San Diego, California, United States

Abstract

In this paper we present the modeling and simulation of a 2 degree-of-freedom (DOF) bidirectional electrothermal actuator. The four arm microactuator was designed to move in both the horizontal and vertical axes. By tailoring the geometrical parameters of the design, the in-plane and out-of-plane motions were decoupled, resulting in enhanced mobility in both directions. The motion of the actuator was modeled analytically using an electro-thermo-mechanical analysis. To validate the analytical model, finite element simulations were performed using ANSYS. The microactuators were fabricated using PolyMUMPS process and experimental results show good agreement with both the analytical model and the simulations. We demonstrated that the 2-DOF bidirectional electrothermal actuator can achieve 3.7 μm in-plane and 13.3 μm out-of-plane deflections with an input voltage of 10 V.

Citation Download Citation

N. Topaloglu, C. Elbuken, P. M. Nieva, M. Yavuz, and J. P. Huissoon "Modeling and simulation of a 2-DOF bidirectional electrothermal microactuator", Proc. SPIE 6926, Modeling, Signal Processing, and Control for Smart Structures 2008, 692605 (3 April 2008); https://doi.org/10.1117/12.776594

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