Paper
18 April 2008 Rectifier-less piezoelectric micro power generator
Arman Hajati, Sang-Gook Kim
Author Affiliations +
Abstract
A novel thin film lead zirconate titanate Pb(Zr,Ti)O3 (PZT) MEMS energy harvesting device is designed and developed for powering autonomous wireless sensors. It is designed to harvest energy from parasitic vibrational energy sources and convert it to electrical energy via the piezoelectric effect. The new pie-shaped design for the harvester is about a size of a nickel and has a radical departure from previous design concepts. This design always generates positive tension on the PZT layer and then positive charge output throughout vibration cycles. It produces mono-polarity output charge without using any additional bridge rectifier circuitry, which will be a huge cost saving for commercial production of scaled-up products. Contrary to the high Q cantilever designs, the new design has a low Q, doubly anchored beam design, which provides a wide bandwidth of operational frequency. This will enable more robust power generation even if the frequency spectrum of the source vibration varies unexpectedly. Furthermore, the beam shape is optimized to achieve uniform strain throughout the PZT layer. To authors' knowledge, this is the first self-rectifying piezoelectric power generator at the MEMS-scale
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Arman Hajati and Sang-Gook Kim "Rectifier-less piezoelectric micro power generator", Proc. SPIE 6928, Active and Passive Smart Structures and Integrated Systems 2008, 69281T (18 April 2008); https://doi.org/10.1117/12.775475
Lens.org Logo
CITATIONS
Cited by 12 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Ferroelectric materials

Electrodes

Semiconducting wafers

Annealing

Oxides

Zirconium dioxide

Sensors

Back to Top