Micro-contact printing method for metal micro-patterning with PUA

K. J. Han; Y. Chen; K. H. Yoo; K. S. Kang; Jaehwan Kim

doi:10.1117/12.776815

26 March 2008 Micro-contact printing method for metal micro-patterning with PUA

K. J. Han, Y. Chen, K. H. Yoo, K. S. Kang, Jaehwan Kim

Proceedings Volume 6931, Nanosensors and Microsensors for Bio-Systems 2008; 69310C (2008) https://doi.org/10.1117/12.776815
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2008, San Diego, California, United States

Abstract

A cellulose solution was prepared using N,N-dimethylacetamide (DMAc), LiCl, and natural pulp. Transparent and smooth surface of the cellulose films were obtained after spin-coating and drying process. The cellulose films can be utilized as a biodegradable and flexible microelectromechanical system (MEMS) due to its electro-active and actuation properties. However, it is difficult to apply conventional lithography process to fabricate MEMS device because of its hydrophilic and flexible nature. Therefore, we applied unconventional lithography process to overcome those problems. Since polydimethylsiloxane (PDMS) has a modulus less than 10MPa, it is not suitable to fabricate high aspect ratio mold. Polyurethaneacrylate (PUA) having a modulus in the range of several hundred was utilized as a mold for micro-contact printing (MCP) process. Although high modulus PUA mold having more than 300MPa had edge defects during the mold-releasing process from the photoresist, the PUA mold having a modulus between 100MPa and 300MPa did not have the edge defect problem. Therefore, PUA mold with a modulus of 200MPa was used in this investigation. Gold was deposited onto the PUA mold, and mercaptopropyltrimethoxysilane (MPTMS) self-assembly monolayer (SAM) was fabricated to the gold surface. The gold was transferred to the cellulose film. The characteristics of the transferred gold electrode on cellulose film were investigated using field emission scanning electron microscope (FESEM).

Citation Download Citation

K. J. Han, Y. Chen, K. H. Yoo, K. S. Kang, and Jaehwan Kim "Micro-contact printing method for metal micro-patterning with PUA", Proc. SPIE 6931, Nanosensors and Microsensors for Bio-Systems 2008, 69310C (26 March 2008); https://doi.org/10.1117/12.776815

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