Comparison of the piezoelectric MEMS generators with interdigital electrodes and laminated electrodes

Bor-Shiun Lee; Shun-Chi Lin; Wen-Jong Wu

doi:10.1117/12.776406

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7 April 2008 Comparison of the piezoelectric MEMS generators with interdigital electrodes and laminated electrodes

Bor-Shiun Lee, Shun-Chi Lin, Wen-Jong Wu

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Proceedings Volume 6933, Smart Sensor Phenomena, Technology, Networks, and Systems 2008; 69331B (2008) https://doi.org/10.1117/12.776406
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2008, San Diego, California, United States

Abstract

To power the tiny sensor devices by MEMS generator which scavenging energy from ambient vibrations is becoming practical due to the power consumption of low power electronics is going down to tens to hundreds μW for integrated wireless sensor devices. In this paper, we are going to present the development on two different types of piezoelectric MEMS generators that have the ability to scavenge mechanical energy of ambient vibrations and transform it into electrical energy. These two piezoelectric MEMS generators are both cantilever type made of silicon process and transform energy with thin PZT layer. However, the first one is with the interdigital electrodes on the top and the other one is with laminated electrodes sandwiched the PZT layer. The theoretical prediction and the process development for the two types of generators will all be presented; the evaluation and comparison of the two generators will also be detailed.

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Bor-Shiun Lee, Shun-Chi Lin, and Wen-Jong Wu "Comparison of the piezoelectric MEMS generators with interdigital electrodes and laminated electrodes", Proc. SPIE 6933, Smart Sensor Phenomena, Technology, Networks, and Systems 2008, 69331B (7 April 2008); https://doi.org/10.1117/12.776406

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