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15 April 2008 Etching of chalcogenide glass for IR microoptics
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Abstract
Manufacturing processes have been developed to produce wafer scale optics in chalcogenide glass using semiconductor fabrication. Chalcogenide materials are amorphous and covalently bonded solids containing one or more of elements in Group VI in the periodic table, e.g. sulphur, selenium, or tellurium as a substantial constituent. For this paper, the material selected for testing to determine the etching process was IG6 - As40Se60. Grayscale photolithography and binary methods were used to pattern diffractive elements for use in infrared applications. Dual-band color correction, incorporating diffractive optics, will be presented in the paper as an application of this development.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John G. Smith and Gregg T. Borek "Etching of chalcogenide glass for IR microoptics", Proc. SPIE 6940, Infrared Technology and Applications XXXIV, 69400W (15 April 2008); https://doi.org/10.1117/12.778748
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