Development and optimization of microcantilever based IR imaging arrays

Scott R. Hunter; Gregory S. Maurer; Gregory Simelgor; Shankar Radhakrishnan; John Gray; Ken Bachir; Thomas Pennell; Martin Bauer; Usha Jagadish

doi:10.1117/12.771652

16 April 2008 Development and optimization of microcantilever based IR imaging arrays

Scott R. Hunter, Gregory S. Maurer, Gregory Simelgor, Shankar Radhakrishnan, John Gray, Ken Bachir, Thomas Pennell, Martin Bauer, Usha Jagadish

Author Affiliations +

Proceedings Volume 6940, Infrared Technology and Applications XXXIV; 694013 (2008) https://doi.org/10.1117/12.771652
Event: SPIE Defense and Security Symposium, 2008, Orlando, Florida, United States

Abstract

Multispectral Imaging has recently made considerable improvements to the sensitivity, uniformity and dynamic range of infrared FPAs based on capacitively read, bimorph microcantilever sensor technology. The company is presently prototyping 160x120 imaging arrays with 50 μm pitch pixels and is actively pursuing the development of next generation 25 μm pitch pixel arrays. Measured peak NETD values for recently fabricated 50μm pitch focal plane arrays are in the 40-50mK range, with individual pixels in the 10-15mK range. The modeled and measured tradeoffs discussed in this paper lead to a possible 2-3 times further improvement in average NETD. A number of factors influence the performance of these devices which includes the optimization of sometimes competing design requirements. For example, the tuning and optimization of the infrared optical resonant cavity structure while maximizing the change in sensor capacitance during IR irradiance. Similarly there are tradeoffs between structural rigidity, which increases the structure resonant frequency improving noise immunity, and thermal response times. These tradeoffs are discussed with reference to real world sensor structures. Results from detailed thermo-electromechanical-optical modeling of the operation of the 25 μm pitch pixels will be discussed in reference to the design and fabrication of 25 μm pitch test pixels. The most recent infrared sensitivity and other performance measurements from the development of the company's first commercial 160 x 120 pixel imaging array product will also be presented.

Citation Download Citation

Scott R. Hunter, Gregory S. Maurer, Gregory Simelgor, Shankar Radhakrishnan, John Gray, Ken Bachir, Thomas Pennell, Martin Bauer, and Usha Jagadish "Development and optimization of microcantilever based IR imaging arrays", Proc. SPIE 6940, Infrared Technology and Applications XXXIV, 694013 (16 April 2008); https://doi.org/10.1117/12.771652

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