The structural and electrochemical properties of tin oxide films prepared by RF magnetron sputtering

Minzhen Cai; Jie Song; Liangtang Zhang; Qihui Wu; Suntao Wu

doi:10.1117/12.792136

11 March 2008 The structural and electrochemical properties of tin oxide films prepared by RF magnetron sputtering

Minzhen Cai, Jie Song, Liangtang Zhang, Qihui Wu, Suntao Wu

Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 69842H (2008) https://doi.org/10.1117/12.792136
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China

Abstract

Tin oxide thin films have been deposited on oxide silicon substrates using a RF magnetron sputtering process with various sputtering power. The crystal structures of the tin oxide thin films were characterized and analyzed by X-ray diffraction. The surface morphology of the films were observed by SEM. The electrochemical properties of the films were also tested by constant current charge and discharge cycle tests. The results of XRD indicate that all the films are crystalline. The results of SEM exhibit that the grain size of surface expands as sputtering power rises.

Citation Download Citation

Minzhen Cai, Jie Song, Liangtang Zhang, Qihui Wu, and Suntao Wu "The structural and electrochemical properties of tin oxide films prepared by RF magnetron sputtering", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69842H (11 March 2008); https://doi.org/10.1117/12.792136

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available