Influence of substrate temperature on the morphology and thermal resistance of vanadium oxide thin films

Xiongbang Wei; Zhiming Wu; Tao Wang; Xiangdong Xu; Jingjing Tang; Yadong Jiang

doi:10.1117/12.792154

11 March 2008 Influence of substrate temperature on the morphology and thermal resistance of vanadium oxide thin films

Xiongbang Wei, Zhiming Wu, Tao Wang, Xiangdong Xu, Jingjing Tang, Yadong Jiang

Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 69842K (2008) https://doi.org/10.1117/12.792154
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China

Abstract

The dependence of morphology and thermal resistance on the substrate temperature during the deposition of the vanadium oxide thin films (VOx) was studied. Atomic-force microscopy (AFM) analysis results revealed that the structural features of VOx thin films strongly depend on the substrate temperature. Analysis of square resistance and its temperature dependence demonstrated that the difference of morphology introduced by substrate temperature plays an important role on the electrical properties of the films. The width of the thermal resistance hysteresis loop was also observed varied with the substrate temperature.

Citation Download Citation

Xiongbang Wei, Zhiming Wu, Tao Wang, Xiangdong Xu, Jingjing Tang, and Yadong Jiang "Influence of substrate temperature on the morphology and thermal resistance of vanadium oxide thin films", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69842K (11 March 2008); https://doi.org/10.1117/12.792154

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