High diffraction efficiency for multi-layer dielectric gratings with rectangular groove

Weijin Kong; Maojin Yun; Cuichun Ling; Xin Sun; Jianda Shao; Zhengxiu Fan

doi:10.1117/12.792247

11 March 2008 High diffraction efficiency for multi-layer dielectric gratings with rectangular groove

Weijin Kong, Maojin Yun, Cuichun Ling, Xin Sun, Jianda Shao, Zhengxiu Fan

Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 69843T (2008) https://doi.org/10.1117/12.792247
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China

Abstract

The purpose of this study is dedicated to the new design of the Multi-layer dielectric grating with the best performance giving a highly diffraction efficiency in the -1 order, by using the rigorous coupled wave Analysis (RCWA). The formulation for the implementation of the RCWA for multi-layer dielectric gratings incorporating the developed enhanced transmittance approach is presented. An optimized design of multi-layer dielectric grating working at 1053-nm with TE polarized light and 51.2° incident can obtain the diffraction efficiency of 99%.

Citation Download Citation

Weijin Kong, Maojin Yun, Cuichun Ling, Xin Sun, Jianda Shao, and Zhengxiu Fan "High diffraction efficiency for multi-layer dielectric gratings with rectangular groove", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69843T (11 March 2008); https://doi.org/10.1117/12.792247

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