NEMS/MEMS cantilever-based biosensors: addressing the open issues

Y. Nemirovsky; A. Shemesh; S. Stolyarova

doi:10.1117/12.787016

24 April 2008 NEMS/MEMS cantilever-based biosensors: addressing the open issues

Y. Nemirovsky, A. Shemesh, S. Stolyarova

Proceedings Volume 6993, MEMS, MOEMS, and Micromachining III; 699302 (2008) https://doi.org/10.1117/12.787016
Event: SPIE Photonics Europe, 2008, Strasbourg, France

Abstract

The impressive developments in micro / nano-electro-mechanical-systems (MEMS; NEMS) have led to a new class of chemical and biological sensors based on micro and nano cantilevers. This work focuses on fabrication challenges of flat cantilevers exhibiting well-controlled, uniform and reproducible mechanical performance. Our experimental study is based on cantilevers made of crystalline silicon (c-Si), using SOI wafers as the starting material and using bulk micromachining. Experimental results on fabrication and characterization of composite porous silicon-crystalline silicon microcantilevers made of SOI wafers are also presented, where the porous silicon surface provides an excellent interface for immobilization of the biosensing layer. The optimal geometric design of microcantilevers depending on the application as well on the selected sensing mode (static or dynamic) is considered. The innovative aspects and open issues of NEMS/MEMS cantilever-based biosensors are addressed.

Citation Download Citation

Y. Nemirovsky, A. Shemesh, and S. Stolyarova "NEMS/MEMS cantilever-based biosensors: addressing the open issues", Proc. SPIE 6993, MEMS, MOEMS, and Micromachining III, 699302 (24 April 2008); https://doi.org/10.1117/12.787016

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