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24 April 2008 Magnetic actuated FR4 scanners for compact spectrometers
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Abstract
A novel magnetic actuated polymer optical platform is integrated into a Michelson interferometer type Fourier transform infrared spectrometer. The proposed advantages of the novel platform over existing approaches, such as MEMS spectrometers, or bulky FTIR systems, include millimeter range dimensions providing a large clear aperture and enabling conventional machining for device fabrication, a controllable AC and/or DC motion both in rotational and translational modes, and low frequency operation. It has been demonstrated that the platform is capable of achieving 400μm DC deflection in ambient pressure in the translational mode, and a total optical scan angle exceeding 60 degrees in the resonant rotational mode. A Michelson type Fourier transform spectrometer was built using a retro-reflector bearing FR4 platform and a spectral resolution of 25cm-1 is demonstrated with this setup. In addition, possible use of the same platform in various other spectrometer configurations and methods to improve the motion precision are discussed.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Çağlar Ataman and Hakan Urey "Magnetic actuated FR4 scanners for compact spectrometers", Proc. SPIE 6993, MEMS, MOEMS, and Micromachining III, 699303 (24 April 2008); https://doi.org/10.1117/12.785375
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