New technologies for tunable micro-optics

Ch. Friese; A. Werber; F. Krogmann; R. Shaik; W. Mönch; H. Zappe

doi:10.1117/12.787018

28 April 2008 New technologies for tunable micro-optics

Ch. Friese, A. Werber, F. Krogmann, R. Shaik, W. Mönch, H. Zappe

Proceedings Volume 6993, MEMS, MOEMS, and Micromachining III; 699306 (2008) https://doi.org/10.1117/12.787018
Event: SPIE Photonics Europe, 2008, Strasbourg, France

Abstract

Microsystems technology may be employed for the conceptualization and fabrication of new types of tunable micro-optical components. Tunable polymer membrane-based micro-lenses, tunable liquid lenses and lens arrays as well as deformable membrane mirrors are presented here.

Citation Download Citation

Ch. Friese, A. Werber, F. Krogmann, R. Shaik, W. Mönch, and H. Zappe "New technologies for tunable micro-optics", Proc. SPIE 6993, MEMS, MOEMS, and Micromachining III, 699306 (28 April 2008); https://doi.org/10.1117/12.787018

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