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28 April 2008 New technologies for tunable micro-optics
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Abstract
Microsystems technology may be employed for the conceptualization and fabrication of new types of tunable micro-optical components. Tunable polymer membrane-based micro-lenses, tunable liquid lenses and lens arrays as well as deformable membrane mirrors are presented here.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ch. Friese, A. Werber, F. Krogmann, R. Shaik, W. Mönch, and H. Zappe "New technologies for tunable micro-optics", Proc. SPIE 6993, MEMS, MOEMS, and Micromachining III, 699306 (28 April 2008); https://doi.org/10.1117/12.787018
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