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25 April 2008 Review of production of microfluidic devices: material, manufacturing and metrology
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Microfluidic devices play a crucial role in biology, life sciences and many other fields. Three aspects have to be considered in production of microfluidic devices: (i) material properties before and after processing, (ii) tooling and processing methodologies, and (iii) measurements for process control. This paper presents a review of these three areas. The key properties of materials are reviewed from both the production and device performance point of views in this paper. The tooling and processing methodologies considered include both the direct tooling methods and the mold based processing methods. The response of material on the production parameters during hot embossing process are simulated for process control and product quality prediction purpose. Finally, the measurements for process control aspect discuss different measurement approaches, especially the defect inspection, critical dimensional measurements, bonding quality characterization and checking functionality. Simulation and experimental results are used throughout the paper to illustrate the effectiveness of such approaches.
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Shiguang Li, Zhiguang Xu, Aaron Mazzeo, Daniel J. Burns, Gang Fu, Matthew Dirckx, Vijay Shilpiekandula, Xing Chen, Nimai C. Nayak, Eehern Wong, Soon Fatt Yoon, Zhong Ping Fang, Kamal Youcef-Toumi, David Hardt, Shu Beng Tor, Chee Yoon Yue, and Jung-Hoon Chun "Review of production of microfluidic devices: material, manufacturing and metrology", Proc. SPIE 6993, MEMS, MOEMS, and Micromachining III, 69930F (25 April 2008);

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