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25 April 2008 Determination of in-plane displacement of MEMS by means of an AFM sensor
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Abstract
Nowadays microelectromechanical systems (MEMS) have found more and more applications in various fields of industry and scientific researches. In the meantime, quality control to MEMS devices and equipment gains more and more importance, in which one of the important tasks is to characterize the in-plane behaviours of MEMS, including the in-plane displacement/deflection/deformation, vibration amplitude, resonant frequency, etc. However, due to the special characteristics of MEMS device, this task cannot be fulfilled easily with high resolution and wide bandwidth. In order to calibrate and to further improve the performance of MEMS actuators and sensors, in this paper, inspection of in-plane displacement of MEMS on the basis of an atomic force microscope is discussed, in which the lateral interaction between an AFM cantilever and a electrostatic actuator is investigated, and its potential application to determine the dynamic behaviour of a MEMS actuators/sensors is demonstrated.
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S. Gao, Z. Li, and K. Herrmann "Determination of in-plane displacement of MEMS by means of an AFM sensor", Proc. SPIE 6993, MEMS, MOEMS, and Micromachining III, 69930J (25 April 2008); https://doi.org/10.1117/12.780407
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