Digital holography in combination with diffraction grating to get super-resolution

M. Paturzo; F. Merola; S. Grilli; S. De Nicola; P. Ferraro

doi:10.1117/12.782111

20 May 2008 Digital holography in combination with diffraction grating to get super-resolution

M. Paturzo, F. Merola, S. Grilli, S. De Nicola, P. Ferraro

Proceedings Volume 6995, Optical Micro- and Nanometrology in Microsystems Technology II; 699505 (2008) https://doi.org/10.1117/12.782111
Event: SPIE Photonics Europe, 2008, Strasbourg, France

Abstract

Resolution is an important issue in inspection of objects on microscopic scale. Various approaches have been investigated to increase the optical resolution behind the diffraction limit of an optical imaging system. Demonstration that super-resolution is possible have been also established in interference microscopy. We have studied the possibility to use diffraction gratings, in different experimental configurations for increasing the aperture of an optical imaging system. The aim of the study is to demonstrate that super-resolution is possible and is a practical and viable method for a coherent optical microscope. We take benefit of the numerical reconstruction properties of DH in combination with diffraction grating to get super-resolution. Various attempts have been performed and results are presented and discussed. The approaches could be used for metrology and imaging application in various fields of engineering and biology.

Citation Download Citation

M. Paturzo, F. Merola, S. Grilli, S. De Nicola, and P. Ferraro "Digital holography in combination with diffraction grating to get super-resolution", Proc. SPIE 6995, Optical Micro- and Nanometrology in Microsystems Technology II, 699505 (20 May 2008); https://doi.org/10.1117/12.782111

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available