Paper
1 May 2008 Study and simulation for the sharp-corner of silicon-on-insulator waveguides
De-Gui Sun, Xiaoqi Li, Dongxia Wong, Trevor Hall
Author Affiliations +
Abstract
The semiconductor industry appears to be encouraging the photonic industry to make highly integrated low-cost optical systems. Planar lightwave circuit (PLC) technology is widely accepted for manufacturing photonic components and Silicon-on-insulator (SOI) waveguides have attracted much research for implementing the highly integrated PLC-based devices. In this work, starting with the guided-mode conversion process and the principle of transportation waves, we mathematically model the structure of corner mirrors of SOI waveguides with a model of effective reflecting interface (ERI). Then we simulate the transfer efficiencies with FDTD method and testify the simulation results with commercial FDTD software tool. Further, we analyze the simulation results and conclude that the conversion efficiency of a corner mirror is determined by several parameters including the geometrical structure, the index-difference of waveguide-reflector materials and the roughness of waveguide-reflector interface. For the corner structure from 90-120°, the optimal transfer efficiency can be achieved more than 98% and the access loss is less than 0.1 dB if the scattering loss of waveguide is not taken into account, but they become 95% and 0.2 dB if the scattering loss is taken into account. For some important PLC components, the deflection angle of 90-120° is good enough for implementing the compact design of highly integrated PLC-based devices.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
De-Gui Sun, Xiaoqi Li, Dongxia Wong, and Trevor Hall "Study and simulation for the sharp-corner of silicon-on-insulator waveguides", Proc. SPIE 6996, Silicon Photonics and Photonic Integrated Circuits, 69960N (1 May 2008); https://doi.org/10.1117/12.781581
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Cited by 1 scholarly publication.
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KEYWORDS
Waveguides

Reflectors

Refractive index

Mirrors

Silicon

Photonic integrated circuits

Interfaces

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