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1 May 2008 Integrated microdisk based lasers for electro-optical applications in CMOS compliance
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Abstract
Low cost, robust and efficient light sources are suitable for optical high speed communications in integrated circuits. Microdisk resonator lasers correspond to one of the most adapted solution in regard to their performances and their processing easiness. They mix low space dimension and low power consumption (threshold<50 μW). The use of dies of InP membranes bonded onto 200 mm SOI wafers allows the fabrication of a complete optical link, with an optical InP based microsource, Si waveguides and sensors for signal collection. Contacting such sources complies with the necessity of using metals - more generally optical absorbing elements - and the necessary low power consumption to stand up traditional electrical circuits. In this paper, we investigate design rules of contacts using a simple model for fast estimated results which are compared to 3D FDTD simulations. In a second part, we will discuss the coupling between a microdisk resonator and a Si waveguide. Then we will describe the fabrication of such devices with a 200mm CMOS pilot line and point out the technological induced limitations.
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Fabien Mandorlo, Pedro Rojo Romeo, Xavier Letartre, Jean-Marc Fedeli, Philippe Regreny, Philippe Grosse, and Pierre Viktorovitch "Integrated microdisk based lasers for electro-optical applications in CMOS compliance", Proc. SPIE 6996, Silicon Photonics and Photonic Integrated Circuits, 699616 (1 May 2008); https://doi.org/10.1117/12.783292
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