Monitoring Of Optical Coatings Of Fractional Layer Thicknesses

T. Skettrup

doi:10.1117/12.937066

10 July 1987 Monitoring Of Optical Coatings Of Fractional Layer Thicknesses

T. Skettrup

Proceedings Volume 0701, 1986 European Conf on Optics, Optical Systems and Applications; (1987) https://doi.org/10.1117/12.937066
Event: 1986 International European Conference on Optics, Optical Systems, and Applications, 1986, Florence, Italy

Abstract

Three methods are proposed for monitoring thin film optical coatings of non-quarterwave-length thicknesses during deposition. These are the turning value method, the inflection point method and the second harmonic method. The advantages of these methods are that they are monochromatic and that they do not rely on any absolute measurements of transmittance during monitoring.

Citation Download Citation

T. Skettrup "Monitoring Of Optical Coatings Of Fractional Layer Thicknesses", Proc. SPIE 0701, 1986 European Conf on Optics, Optical Systems and Applications, (10 July 1987); https://doi.org/10.1117/12.937066

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