Evaluation of the fully-depleted back-illuminated CCD for Subaru Suprime-Cam

Yukiko Kamata; Satoshi Miyazaki; Hidehiko Nakaya; Takeshi Go Tsuru; Hiroshi Tsunemi; Emi Miyata; Masaharu Muramatsu; Hisanori Suzuki; Kazuhisa Miyaguchi

doi:10.1117/12.790220

22 July 2008 Evaluation of the fully-depleted back-illuminated CCD for Subaru Suprime-Cam

Yukiko Kamata, Satoshi Miyazaki, Hidehiko Nakaya, Takeshi Go Tsuru, Hiroshi Tsunemi, Emi Miyata, Masaharu Muramatsu, Hisanori Suzuki, Kazuhisa Miyaguchi

Author Affiliations +

Proceedings Volume 7021, High Energy, Optical, and Infrared Detectors for Astronomy III; 70211S (2008) https://doi.org/10.1117/12.790220
Event: SPIE Astronomical Telescopes + Instrumentation, 2008, Marseille, France

Abstract

In order to improve the quantum efficiency (QE) at longer wavelength, we have developed fully-depleted backilluminated CCDs in collaboration with Hamamatsu Photonics K.K (HPK). Recently, HPK delivered 10 CCDs for Subaru Prime Focus Camera (Suprime-Cam). These CCDs are made on N-type, high resistivity silicon wafers. Each CCD has a 200 μm thick depletion layer. The CCD format is four-side buttable, 2k × 4k, 15 μm square pixels with 4 low noise output amplifiers. The characteristics of the CCDs have been tested in the laboratory before they are installed into Suprime-Cam dewar. These CCDs have excellent performance; readout noise < 5 e^-, dark current < 2 e^-/hour/pixel, parallel and serial charge transfer efficiency (CTE) > 0.999995, and full-well ~ 180,000 e^-. The QE of λ = 1 μm was 40 % at -100°C. All CCDs have good cosmetics. Surface flatness is ~ 25 μm peak to value (P-V). The specification was acceptable. We are also developing CCDs for Hype Suprime-Cam (HSC), the next generation instrument for Subaru Telescope. HPK optimized back side process and has developed blue enhanced CCDs for HSC.

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Yukiko Kamata, Satoshi Miyazaki, Hidehiko Nakaya, Takeshi Go Tsuru, Hiroshi Tsunemi, Emi Miyata, Masaharu Muramatsu, Hisanori Suzuki, and Kazuhisa Miyaguchi "Evaluation of the fully-depleted back-illuminated CCD for Subaru Suprime-Cam", Proc. SPIE 7021, High Energy, Optical, and Infrared Detectors for Astronomy III, 70211S (22 July 2008); https://doi.org/10.1117/12.790220

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