Subnanometer characterization of large aperture optical components using broad-band interferometry

A. M. Sergeev; E. A. Khazanov; I. E. Kozhevatov; D. E. Silin

doi:10.1117/12.803935

5 June 2008 Subnanometer characterization of large aperture optical components using broad-band interferometry

A. M. Sergeev, E. A. Khazanov, I. E. Kozhevatov, D. E. Silin

Proceedings Volume 7022, Advanced Laser Technologies 2007; 70220I (2008) https://doi.org/10.1117/12.803935
Event: Advanced Laser Technologies 2007, 2007, Levi, Finland

Abstract

A new method of high order broad-band optical interferometry is presented. The core concept is to use surface control of broad-band radiation with a complex, specially prepared spectrum. High order broad-band interferometers have several merits: selectivity along the line of sight, high noise immunity (and correspondingly high accuracy) and the possibility of carrying out precise measurements without mechanically moving the reference or test plates. These interferometers permit control of large aperture optical elements (including remote control) with nanometer and even subnanometer accuracy. Some application examples of high order broad-band interferometry are demonstrated.

Citation Download Citation

A. M. Sergeev, E. A. Khazanov, I. E. Kozhevatov, and D. E. Silin "Subnanometer characterization of large aperture optical components using broad-band interferometry", Proc. SPIE 7022, Advanced Laser Technologies 2007, 70220I (5 June 2008); https://doi.org/10.1117/12.803935

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available